AZO film coating equipment

The horizontal/vertical continuous magnetron sputtering AZO filmcoating equipment has 7 vacuum chambers, Part 1 is the entrance chamber; part 2 is entrance buffering chamber; part 3is the entrance transfer chamber, part 4is the process chamber; part 5 is the exit transfer chamber; part 6 is the exit buffering chamber; part 7 is the exit chamber; Two pairs of mid-frequency dual Si target which is controlled by PUC04 closed loop ring form the high-quality SiO2 isolating layer; 10 pairs of column AZO target realize the high-quality AZO transparent conductive film; the dimension of processing in design is the plane base plate materials of 1100mm wide and 1400mm long. The cycle of production and processing can be optimized to 100-180 second. The production has the advanced design which uses the molecular pump to form the atmosphere separation by pumping. Also, it has used the turbo-molecular pump to get high-efficiency isolation, stable pumping speed and even distribution if air. 1. Technical characteristics of production line equipment type horizontal/vertical continuous magnetron sputtering coating line dimension of carrier designed according to the substrate of 1×1100mm× 1400mm(×3mm (can be customized according to requirements ) design requirements of film uniformity in area of effective deposit, the uniformity of film thickness ≤±5% cathode structure adopt the mid-frequency dual rotary cathode Driving mode adopt the small vertial vehicle which is driven by double friction to load the carrier (vertical)or magnetic steering friction drive(horizontal) realization of coating technology adopt the ZnO: A1 ceramic target and reactive sputtering deposit technology Control of coating temperature adopt the stainless sheathed heating device (can use the light tube to heat according to requirements of customers); the highest temperature is 350Degrees Celsius. Within the range from ambient temperature to 400 Degrees Celsius, it can be designed according the any setting; the stability of control is ±5Degrees Celsius control system the control system can realize the man-machine dialogue and carry out necessary intervention in production process. During operating process, there are alarm indication and error display; the alarm display can indicate the correct operation and troubleshooting for operators. 2.Main technical parameters Final vacuum 6 × 1 0E-4 Pa Average production cycle 80-180 seconds / frame Carrier size 1100 mm× 1400mm (can be customized on request) Film uniformity ±5%